硅片插片机

1．外壳均采用304不锈钢材料制作，表面磨光处理。外观简洁、流畅。

The machine enclosure is made of 304 stainless steel and its surface is polished, the machine appearance is compact and smooth.

2．工作机器支架及硅片盒夹具均采用耐腐蚀、经特殊亚光电化学处理的不锈钢材料。

work head and silicon chip box fixture are both used the anti-corrosive stainless steel which is treated by special sub-photoelectric chemistry

3．设备配置：磁力驱动循环水泵，水箱总容积0.3m³,硅片水床滑台，滚珠丝杆传动三工位升降花篮座，三菱高分辨率MR-J2S系列伺服电机，三菱可编程序控制器、Autonics传感器，eao按钮。

The machine configuration: cycling water pump driven by magnetic force, water tank capacity 0.3 m3 , silicon chip water-bed sliding table, three-workstation basket fixture lifted by ball screw, Mitsubishi MR-J2S servo motor with high resolution, Mitsubishi PLC, Autonics sensor and EAO press button

4．125mm-156mm硅片通用，节拍40-60片/min。

the machine working range: 125mm-156mm silicon chips, cycle time 40-60 chips/min

5. 手动调整，自动排片（需人工上料）.

manual adjustment and auto tiering chip (loading by manual)

6. 设备全封闭设计，美观大方；一体式组合脚轮，定位、移动两便。

fully enclosed design, integrated truckle is easy to move and fix

7. 管路、水过滤器及阀门等管件均采用304不锈钢材料。

pipeline and water filter and valve are all adopted 304 stainless steel

1． 无污染物排放。

no pollution draining

2. 电源采用单相三线制，机器必须接地（PE）。

power supply adopt single phase 3 line system, the machine must be ground(PE).

3. 机、机电安全互锁。

the mechanism, mechanism and electricity safe interlock

1．电器传动系统采用PLC可编程控制器及高分辨率伺服电机；机械传动采用直线轴承滑块、直线轴及滚珠丝杆副，结构简洁，运动精度高。

the electric transmission is through PLC controller and high resolution servo motor; the mechanical transmission is through linear bearing sliding block, shaft and ball screw pair, its structure is compact and movement accuracy is high

2．花篮就位检测，排片滞留报警；可防止碎片和放发生故障。

basket fixture positioning check and tiering chip error alarm, which prevent fragments from causing fault

3．快换花篮治具，适应随时更换产品；水床滑台、水流助推提高排片可靠性。

fast changing basket fixture, it’s suitable to change chips; water-bed sliding table is reliable by water flow boosting

4. 产品执行标准：符合国家相关工业技术标准。

the machine implement criterion which comply with related industry technology criterion.